JPH0648854Y2 - ホットプレ−ト - Google Patents
ホットプレ−トInfo
- Publication number
- JPH0648854Y2 JPH0648854Y2 JP657585U JP657585U JPH0648854Y2 JP H0648854 Y2 JPH0648854 Y2 JP H0648854Y2 JP 657585 U JP657585 U JP 657585U JP 657585 U JP657585 U JP 657585U JP H0648854 Y2 JPH0648854 Y2 JP H0648854Y2
- Authority
- JP
- Japan
- Prior art keywords
- hot plate
- vertical hole
- semiconductor wafer
- hole
- bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 33
- 238000010438 heat treatment Methods 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 32
- 238000000034 method Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP657585U JPH0648854Y2 (ja) | 1985-01-21 | 1985-01-21 | ホットプレ−ト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP657585U JPH0648854Y2 (ja) | 1985-01-21 | 1985-01-21 | ホットプレ−ト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61123541U JPS61123541U (en]) | 1986-08-04 |
| JPH0648854Y2 true JPH0648854Y2 (ja) | 1994-12-12 |
Family
ID=30484143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP657585U Expired - Lifetime JPH0648854Y2 (ja) | 1985-01-21 | 1985-01-21 | ホットプレ−ト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648854Y2 (en]) |
-
1985
- 1985-01-21 JP JP657585U patent/JPH0648854Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61123541U (en]) | 1986-08-04 |
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